Based on localized spoof surface plasmons (LSSPs), a new microwave nondestructive testing (NDT) sensor is proposed to measure the thickness of magnetic absorbing coating on metallic surface. The ...

Overlay (OVL) is a key index in lithography, which will determine product quality, and its measurement is affected by many factors, such as measurement tool, measurement strategy, OVL mark and STI CMP ...

Enter vision measuring systems: a category of high-precision metrology tools relying on optical technology to inspect parts ...